3) CleanCleaning the anode / cathode
The removed anode and cathode will have a film of deposition formed on a portion of their surface (caused by the sputtering of the target). Use a rubber stone or lathe etc. attached to a leutor, to removsolve1 the film of deposition and residue. Lastly, make sure ensure 2 no particles attach to the surface.
4) CleanCleaning the Ar Injection Pipe
Residue will also adhere to the Ar 3 injection pipe (mainly at the endtip). Use a file etc. to remove any residue.
5) InstallInstalling the target
Once you have finished 4 cleaning, attach the new replacement target. 5 Firstly, hold down the target with a Cu board to attach the cathode. Turn the cathode clockwise, to tighten it. Then, also turn the anode clockwise to attach it. Please attach the anode so to leave a gap of roughly 2mm betweenaround the 6 anode and the cathode. Use the stick provided, and slide it through the gap (it should fit in smoothly). Once the anode is in the correct position, turn the stopper on the opposite side, clockwise, and ensure the anode and the stopper are firmly in place.7
Once installation of the anode is complete, use a tester etc. to confirm the anode and cathode are isolated. Regarding the coaxial 8 cable, the centrecenter will be the cathode and the surrounding, part is the anode9 . Also check if the10 coaxial cable and the cathode
body/anode body are conducting.
6) Adjusting the position of the target and Ar injection pipe
Make looseLoosen the stopper on the pipe held by the flange on the sputtering source. TheMove the pipe is moved towardsin the 11 axial direction to adjust the position of the target, according to the type of
target being used. Then, also adjust the position of the Ar injection pipe accordingly.
The sputtering source is now ready to be mounted toin the chamber.
